Micro electro mechanical cantilever with electrostatically controlled tip contact

Micro - Electro - Mechanical - Systems ( Mems )

Shape Optimization of Electrostatically Actuated Micro Cantilever Beam with Extended Travel Range Using Simulated Annealing

The pull-in instability places substantial restrictions on the performance of electrostatically driven MEMS devices by limiting their range of travel. Our objective is to present a systematic method of carrying out optimal design of novel types of electrostatic beams that have enhanced travel ranges. In this paper, we implement a shape optimization methodology using simulated annealing to maxim...

Employing electro-mechanical analogies for co-resonantly coupled cantilever sensors

Understanding the behaviour of mechanical systems can be facilitated and improved by employing electro-mechanical analogies. These analogies enable the use of network analysis tools as well as purely analytical treatment of the mechanical system translated into an electric circuit. Recently, we developed a novel kind of sensor set-up based on two coupled cantilever beams with matched resonance ...

Tunable Optical Microresonators with Micro-Electro- Mechanical-System (MEMS) Integration

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...